A hydrogen peroxide sterilization process consists of H2O2 vapor filling the sterilizer chamber, contacting and sterilizing uncovered system surfaces. The design and progress of a decontamination cycle usually happens on completion from the OQ. USP3 yet again gives steerage on this topic as does PIC/S6 which released a worthwhile https://www.tumblr.com/tailinscitech/805885788785180672/optimizing-pharma-filling-and-sealing-processes?source=share